Omnisafe Torque Elimination Fitting case studies

1) Lawrence Livermore National Labs - On heated HF lines, the metal face seal fitting without torque elimination loosened during thermal cycling causing HF to leak out of the sniff hole of the female nut. Omnisafe did not loosen during thermal cycling. These fittings are still in use after being opened and retightened every day for 5 years, over 1350 make-ups so far. The metal face seal fitting without torque elimination had to be replaced every 2-3 weeks.

2) Applied Materials – The Process Module Technology Center (PMTC) is Applied Materials' flagship 300mm system and process development facility. This facility contains the equipment and processes needed for Applied's customers to fully develop and pre-test a completely integrated multi-level metal copper interconnect process before delivery. In designing this innovative fab, planners were challenged to look forward and try to envision the facility requirements for the next 4 - 6 generations of cutting edge chip development. Using the International Technology Roadmap for Semiconductors (ITRS 2001) as a guide the Omnisafe torque elimination metal face seal fitting was selected for its superior performance in safety and contamination control. The Omnisafe "next generation" fitting is specified globally for all new construction at Applied Materials.

3) Several Fabs - Problems with nickel gaskets. Nickel will catalyze reactions or be subject to pitting on process lines containing carbon monoxide, ozone, ammonia, triethyl arsenic and phosphorous compounds. Non-plated stainless steel gaskets are preferred in these applications. Because of severe galling, the stainless steel gasket is difficult to seal in the standard metal face seal fitting. The Omnisafe fitting can seal with a stainless steel gasket easily with no galling. HP has specified the Omnisafe fitting where stainless steel gaskets are used and additionally, in connections where the union must be made and broken multiple times.

4) LSI Logic - It was discovered that the connection points between gas assemblies and the facility tubing were particularly susceptible to sealing issues. Omnisafe fittings rectified the sealing issues at these points.

5) BOC - The CGA fitting is used to connect a gas cylinder to process lines or analytical equipment. The metal face seal fitting from this CGA to the adjacent pigtail will normally suffer damage to the toroid and not seal after multiple make-ups. By adding torque eliminators to this fitting we are able to extend the life of this component dramatically. This fitting is still sealing properly after 92 cylinder changes.

6) IBM - Bulkhead Unions attached to the pigtail coming from the process gas cylinder experience rotational torque, loosening, and galling. By eliminating the torque from this fitting the union was made safer, cleaner, and requires less maintenance.

7) SDL - Stainless steel lines supply process gas from a manifold to a flow top. The lines need to be removed so that the chamber can be opened and cleaned periodically. Omnisafe torque elimination was used to prevent damage to the sealing surfaces after multiple tightenings and to prevent the lines from rotating. In the confined space it was possible to tighten the fitting by rotating either male or female nut while holding the other stationary.

8) Texas Instruments - Process lines are connected to a component made of a crystal material, if torque is applied to the adjacent union the crystal part will break loose. The Omnisafe fitting prevents this torque, rotation and damage. This application will work equally well for systems containing ceramic or graphite components. The Omnisafe fittings were also used for hazardous process gases, silane and phosphine at this facility.